Real-time measurement of optical properties: 'Vacuum Ellipsometer Deposition System'
A deposition device for ellipsometry that can measure optical properties in real time during vacuum deposition.
Our company designs, manufactures, and sells a "vacuum ellipsometer deposition system" that can measure the optical properties of thin films in real-time during deposition. 【Deposition System Main Specifications】 ○ Main Body and Chamber → Deposition chamber dimensions: 280mm (width) × 290mm (depth) × 410mm (height) → Ellipsometer mounting flange: angle selectable 100°/120°/140° → Aluminum door: viewing window (effective visible diameter: φ96mm) → Three ports for external feedthrough (NW40) → One port for vacuum exhaust (NW40) ○ Substrate Holder Structure → Maximum substrate size: φ110mm → Substrate heating or cooling structure
- Company：エイエルエステクノロジー
- Price：Other
